Veeco has just launched its InSight 3D Automated Atomic Force Microscope (AFM) Platform that boasts to be the one and only “metrology system available with the accuracy and precision required for non-destructive, high resolution three-dimensional (3D) measurements of critical 45nm and 32nm semiconductor features, with the speed to qualify as a true fab tool”. It has been specially designed to to address Critical Dimension (CD), depth and chemical mechanical planarization (CMP) metrology in a production environment. Usage of the InSight 3D Automated Atomic Force Microscope will theoretically result in shorter process development and manufacturing ramp times as well as improved process control.
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